Linear piezo nanopositioning stages scanners for fluorescence microscope quick step time XYZ stage
Linear piezo nanopositioning stages scanners for fluorescence microscope quick step time XYZ stage
·XYZ stage
·fluorescence microscope quick step time
·Scanning microscopy
|
Models |
S-Closed loop K-Open loop |
P12.X100S P12.X100K |
P12.Z100S P12.Z100K |
P12.Z200S P12.Z200K |
P12.Z300S P12.Z300K |
P12.XY100S P12.XY100K |
P12.XYZ100S P12.XYZ100K |
Units |
|
Active axes |
X |
Z |
Z |
Z |
X,Y |
X,Y,Z |
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|
|
Travel range@120V |
80 |
80 |
160 |
240 |
80 |
80 |
μm±20% |
|
|
Travel range@150V |
100 |
100 |
200 |
300 |
100 |
100 |
μm±20% |
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|
Sensor |
SGS/- |
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Aperture |
Ø25/Ø35 |
mm |
||||||
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Closed/open loop resolution |
7/4 |
11/5 |
7/4 |
nm |
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Closed-loop linearity |
0.05/- |
0.05/- |
0.1/- |
0.15/- |
0.1/- |
0.1/- |
%F.S |
|
|
Repeatability |
0.02/- |
0.02/- |
0.05/- |
0.1/- |
0.05/- |
0.05/- |
%F.S |
|
|
Pitch/Yaw/Roll |
<10 |
<10 |
<15 |
<15 |
<10 |
<15 |
μrad |
|
|
Unloaded resonant frequency |
230 |
220 |
150 |
100 |
X180/Y230 |
X230/Y180/Z150 |
Hz±20% |
|
|
Closed/open-loop unloaded Step time |
10/0.8 |
10/0.8 |
15/1.6 |
30/2.4 |
15/0.8 |
30/0.8 |
ms±20% |
|
|
Unloaded operating frequency |
10% Travel |
100 |
100 |
50 |
30 |
100 |
50 |
Hz±20% |
|
100% Travel |
9 |
10 |
5 |
3 |
9 |
5 |
||
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Load capacity |
0.8 |
0.8 |
0.5 |
0.4 |
0.7 |
0.6 |
kg |
|
|
Capacitance |
1.8 |
1.8 |
3.6 |
5.4 |
1.8/axis |
1.8/axis |
μF±20% |
|
|
Material |
Steet, Aluminum |
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Mass |
140 |
140 |
200 |
260 |
200 |
260 |
g±5% |
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